Invention Grant
- Patent Title: MEMS coriolis gas flow controller
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Application No.: US17043182Application Date: 2019-04-02
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Publication No.: US11662237B2Publication Date: 2023-05-30
- Inventor: Iqbal A. Shareef , Dennis Smith , John E. Daugherty
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- International Application: PCT/US2019/025389 2019.04.02
- International Announcement: WO2019/195292A 2019.10.10
- Date entered country: 2020-09-29
- Main IPC: G01F1/84
- IPC: G01F1/84 ; G01F15/00 ; G01F1/48

Abstract:
A fluid delivery system includes N first valves. Inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero. N mass flow controllers include a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves. A second valve has an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber. A controller in communication with the MEMS Coriolis flow sensor is configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor.
Public/Granted literature
- US20210140807A1 MEMS CORIOLIS GAS FLOW CONTROLLER Public/Granted day:2021-05-13
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