Invention Grant
- Patent Title: Resistive random access memory structure and fabricating method of the same
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Application No.: US17541226Application Date: 2021-12-02
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Publication No.: US11665913B2Publication Date: 2023-05-30
- Inventor: Yi-Yu Lin , Po-Kai Hsu , Chung-Yi Chiu
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN 2111287182.1 2021.11.02
- Main IPC: H10B63/00
- IPC: H10B63/00

Abstract:
A resistive random access memory (RRAM) structure includes a substrate. A transistor is disposed on the substrate. The transistor includes a gate structure, a source and a drain. A drain contact plug contacts the drain. A metal interlayer dielectric layer is disposed on the drain contact plug. An RRAM is disposed on the drain and within a first trench in the metal interlayer dielectric layer. The RRAM includes the drain contact plug, a metal oxide layer and a top electrode. The drain contact plug serves as a bottom electrode of the RRAM. The metal oxide layer contacts the drain contact plug. The top electrode contacts the metal oxide layer and a metal layer is disposed within the first trench.
Public/Granted literature
- US20230136441A1 RESISTIVE RANDOM ACCESS MEMORY STRUCTURE AND FABRICATING METHOD OF THE SAME Public/Granted day:2023-05-04
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