Invention Grant
- Patent Title: Method of controlling chemical concentration in electrolyte
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Application No.: US17700402Application Date: 2022-03-21
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Publication No.: US11668019B2Publication Date: 2023-06-06
- Inventor: Yung-Chang Huang , You-Fu Chen , Yu-Chi Tsai , Chu-Ting Chang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: C25D21/14
- IPC: C25D21/14 ; H01L21/288 ; C25D3/38 ; C25D7/12 ; C25D21/08 ; C25D21/18
Abstract:
A method of controlling chemical concentration in electrolyte includes measuring a chemical concentration in an electrolyte, wherein the electrolyte is contained in a tank; and increasing a vapor flux through an exhaust pipe connected to the tank when the measured chemical concentration is lower than a control lower limit value.
Public/Granted literature
- US20230002926A1 METHOD OF CONTROLLING CHEMICAL CONCENTRATION IN ELECTROLYTE Public/Granted day:2023-01-05
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