- Patent Title: Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic block
-
Application No.: US17750405Application Date: 2022-05-23
-
Publication No.: US11668746B2Publication Date: 2023-06-06
- Inventor: Indranil De , Marian Mankos , Dennis Ciplickas , Christopher Hess , Jeremy Cheng , Balasubramanian Murugan , Qi Hu
- Applicant: PDF SOLUTIONS, INC.
- Assignee: PDF SOLUTIONS, INC.
- Current Assignee: PDF SOLUTIONS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Resonance IP Law, PC
- Main IPC: G01R31/306
- IPC: G01R31/306 ; G01R31/302 ; G01R31/265
Abstract:
Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.
Public/Granted literature
Information query
