公开(公告)号：US12038802B2

公开(公告)日：2024-07-16

申请号：US17070520

申请日：2020-10-14

申请人： PDF Solutions, Inc.

发明人： Tomonori Honda ,  Richard Burch ,  John Kibarian ,  Lin Lee Cheong ,  Qing Zhu ,  Vaishnavi Reddipalli ,  Kenneth Harris ,  Said Akar ,  Jeffrey D David ,  Michael Keleher ,  Brian Stine ,  Dennis Ciplickas

IPC分类号： G06N20/00 ,  G06F11/07 ,  G06F18/211 ,  G06F18/241 ,  G06F18/40 ,  H01L21/02 ,  G06F3/0482 ,  G06N3/08 ,  G06N7/01

CPC分类号： G06F11/079 ,  G06F11/0736 ,  G06F11/0751 ,  G06F11/0778 ,  G06F18/211 ,  G06F18/241 ,  G06F18/40 ,  G06N20/00 ,  H01L21/02 ,  G06F3/0482 ,  G06N3/08 ,  G06N7/01

摘要： Classifying wafers using Collaborative Learning. An initial wafer classification is determined by a rule-based model. A predicted wafer classification is determined by a machine learning model. Multiple users can manually review the classifications to confirm or modify, or to add user classifications. All of the classifications are input to the machine learning model to continuously update its scheme for detection and classification.

公开(公告)号：US20230358804A1

公开(公告)日：2023-11-09

申请号：US18144146

申请日：2023-05-05

申请人： PDF SOLUTIONS, INC.

发明人： Indranil DE ,  Marian MANKOS ,  Dennis CIPLICKAS ,  Christopher HESS ,  Jeremy CHENG ,  Balasubramanian MURUGAN ,  Qi HU

IPC分类号： G01R31/306 ,  G01R31/302 ,  G01R31/265

CPC分类号： G01R31/306 ,  G01R31/3025 ,  G01R31/2653

摘要： Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US20230282444A1

公开(公告)日：2023-09-07

申请号：US18108583

申请日：2023-02-11

申请人： PDF SOLUTIONS, INC.

发明人： Indranil DE ,  Jeremy CHENG ,  Thomas SOKOLLIK ,  Yoram SCHWARZ ,  Stephen LAM ,  Xumin SHEN

IPC分类号： H01J37/317 ,  H01J37/30 ,  G01R31/306 ,  G01R31/265

CPC分类号： H01J37/3175 ,  G01R31/2653 ,  G01R31/306 ,  H01J37/3005 ,  H01J2237/31762

摘要： Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US11605526B2

公开(公告)日：2023-03-14

申请号：US17739063

申请日：2022-05-06

申请人： PDF SOLUTIONS, INC.

发明人： Indranil De ,  Jeremy Cheng ,  Thomas Sokollik ,  Yoram Schwarz ,  Stephen Lam ,  Xumin Shen

IPC分类号： G01R31/265 ,  H01J37/317 ,  H01J37/30 ,  G01R31/306

摘要： Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US20220365134A1

公开(公告)日：2022-11-17

申请号：US17750405

申请日：2022-05-23

申请人： PDF SOLUTIONS, INC.

发明人： Indranil DE ,  Marian MANKOS ,  Dennis CIPLICKAS ,  Christopher HESS ,  Jeremy CHENG ,  Balasubramanian MURUGAN ,  Qi HU

IPC分类号： G01R31/306 ,  G01R31/302 ,  G01R31/265

摘要： Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US20220327268A9

公开(公告)日：2022-10-13

申请号：US17303666

申请日：2021-06-04

申请人： PDF Solutions, Inc.

发明人： Tomonori Honda ,  Lin Lee Cheong ,  Lakshmikar Kuravi ,  Bogdan Cirlin

IPC分类号： G06F30/33 ,  G06N20/00 ,  G06Q30/02

摘要： A robust predictive model. A plurality of different predictive models for a target feature are run, and a comparative analysis provided for each predictive model that meet minimum performance criteria for the target feature. One of the predictive models is selected, either manually or automatically, based on predefined criteria. For semi-automatic selection, a static or dynamic survey is generated for obtaining user preferences for parameters associated with the target feature. The survey results will be used to generate a model that illustrates parameter trade-offs, which will be used to finalize the optimal predictive model for the user.

公开(公告)号：US11295993B2

公开(公告)日：2022-04-05

申请号：US17002250

申请日：2020-08-25

申请人： PDF Solutions, Inc.

发明人： Tomonori Honda ,  Jeffrey Drue David ,  Lin Lee Cheong

IPC分类号： G06F11/22 ,  G06F7/50 ,  H01L21/66 ,  G06N20/00 ,  G01R31/26

摘要： A maintenance tool for semiconductor process equipment and components. Sensor data is evaluated by machine learning tools to determine when to schedule maintenance action.

公开(公告)号：US20210098229A1

公开(公告)日：2021-04-01

申请号：US17061401

申请日：2020-10-01

申请人： PDF SOLUTIONS, INC.

发明人： Indranil DE ,  Jeremy CHENG ,  Thomas SOKOLLIK ,  Yoram SCHWARZ ,  Stephen LAM ,  Xumin SHEN

IPC分类号： H01J37/317 ,  H01J37/30

摘要： Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US20210096179A1

公开(公告)日：2021-04-01

申请号：US17061352

申请日：2020-10-01

申请人： PDF Solutions, Inc.

发明人： Indranil DE ,  Marian MANKOS ,  Dennis CIPLICKAS ,  Christopher HESS ,  Jeremy CHENG ,  Balasubramanian MURUGAN ,  Qi HU

IPC分类号： G01R31/306 ,  G01R31/265 ,  G01R31/302

摘要： Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US10777472B1

公开(公告)日：2020-09-15

申请号：US16147631

申请日：2018-09-29

申请人： PDF Solutions, Inc.

发明人： Stephen Lam ,  Dennis Ciplickas ,  Tomasz Brozek ,  Jeremy Cheng ,  Simone Comensoli ,  Indranil De ,  Kelvin Doong ,  Hans Eisenmann ,  Timothy Fiscus ,  Jonathan Haigh ,  Christopher Hess ,  John Kibarian ,  Sherry Lee ,  Marci Liao ,  Sheng-Che Lin ,  Hideki Matsuhashi ,  Kimon Michaels ,  Conor O'Sullivan ,  Markus Rauscher ,  Vyacheslav Rovner ,  Andrzej Strojwas ,  Marcin Strojwas ,  Carl Taylor ,  Rakesh Vallishayee ,  Larg Weiland ,  Nobuharu Yokoyama

IPC分类号： H01L23/58 ,  H01L21/66 ,  H01L23/528

摘要： An IC includes a contiguous standard cell area with first, second, and third TS-GATE-short-configured test area geometries disposed therein. In some embodiments, the contiguous standard cell area may further include: fourth and fifth TS-GATE-short-configured test area geometries, and/or other test area geometries, such as tip-to-tip-short, tip-to-side-short, diagonal-short, corner-short, interlayer-overlap-short, via-chamfer-short, merged-via-short, snake-open, stitch-open, via-open, or metal-island-open.