公开(公告)号：US11340293B2

公开(公告)日：2022-05-24

申请号：US17061352

申请日：2020-10-01

Applicant: PDF SOLUTIONS, INC.

Inventor： Indranil De ,  Marian Mankos ,  Dennis Ciplickas ,  Christopher Hess ,  Jeremy Cheng ,  Balasubramanian Murugan ,  Qi Hu

IPC: G01R31/26 ,  G01R31/306 ,  G01R31/302 ,  G01R31/265

Abstract: Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US11668746B2

公开(公告)日：2023-06-06

申请号：US17750405

申请日：2022-05-23

Applicant: PDF SOLUTIONS, INC.

Inventor： Indranil De ,  Marian Mankos ,  Dennis Ciplickas ,  Christopher Hess ,  Jeremy Cheng ,  Balasubramanian Murugan ,  Qi Hu

IPC: G01R31/306 ,  G01R31/302 ,  G01R31/265

CPC classification number: G01R31/306 ,  G01R31/2653 ,  G01R31/3025

Abstract: Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US12038476B2

公开(公告)日：2024-07-16

申请号：US18144146

申请日：2023-05-05

Applicant: PDF SOLUTIONS, INC.

Inventor： Indranil De ,  Marian Mankos ,  Dennis Ciplickas ,  Christopher Hess ,  Jeremy Cheng ,  Balasubramanian Murugan ,  Qi Hu

IPC: G01R31/306 ,  G01R31/265 ,  G01R31/302

CPC classification number: G01R31/306 ,  G01R31/2653 ,  G01R31/3025

Abstract: Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.