Invention Grant
- Patent Title: Metal mirror based multispectral filter array
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Application No.: US17445623Application Date: 2021-08-23
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Publication No.: US11670658B2Publication Date: 2023-06-06
- Inventor: Georg J. Ockenfuss
- Applicant: VIAVI Solutions Inc.
- Applicant Address: US CA San Jose
- Assignee: VIAVI Solutions Inc.
- Current Assignee: VIAVI Solutions Inc.
- Current Assignee Address: US AZ Chandler
- Agency: Harrity & Harrity, LLP
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L31/02 ; H01L27/146 ; H01L31/0216 ; G01J3/51 ; G01J3/02 ; G01J3/26 ; G01J3/28 ; G01J3/36 ; G02B5/28 ; H01L33/60 ; H01L27/32 ; H01L33/46 ; H01L51/52
Abstract:
A device may include a multispectral filter array disposed on the substrate. The multispectral filter array may include a first metal mirror disposed on the substrate. The multispectral filter may include a spacer disposed on the first metal mirror. The spacer may include a set of layers. The spacer may include a second metal mirror disposed on the spacer. The second metal mirror may be aligned with two or more sensor elements of a set of sensor elements.
Public/Granted literature
- US20210384242A1 METAL MIRROR BASED MULTISPECTRAL FILTER ARRAY Public/Granted day:2021-12-09
Information query
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