Invention Grant
- Patent Title: Ultrasonic transducer operable in a surface acoustic wave (SAW) mode
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Application No.: US15424703Application Date: 2017-02-03
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Publication No.: US11673165B2Publication Date: 2023-06-13
- Inventor: Michael Daneman
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: InvenSense, Inc.
- Current Assignee: InvenSense, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: B06B1/06
- IPC: B06B1/06 ; H01L41/18 ; H10N30/85 ; H10N30/87 ; H10N30/00 ; H01L41/047 ; H01L41/08

Abstract:
A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane is configured to allow movement at ultrasonic frequencies. The membrane includes a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. The PMUT is also configured to operate in a Surface Acoustic Wave (SAW) mode. Also provided are an integrated MEMS array, a method for operating an array of PMUT/SAW dual-mode devices, and a PMUT/SAW dual-mode device.
Public/Granted literature
- US20170326590A1 ULTRASONIC TRANSDUCER OPERABLE IN A SURFACE ACOUSTIC WAVE (SAW) MODE Public/Granted day:2017-11-16
Information query
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