- Patent Title: Method for fabricating a plurality of time-of-flight sensor devices
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Application No.: US16754335Application Date: 2018-10-10
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Publication No.: US11675049B2Publication Date: 2023-06-13
- Inventor: Harald Etschmaier , Thomas Bodner
- Applicant: ams AG
- Applicant Address: AT Premstaetten
- Assignee: ams AG
- Current Assignee: ams AG
- Current Assignee Address: AT Premstaetten
- Agency: MH2 Technology Law Group, LLP
- Priority: EP 196120 2017.10.12
- International Application: PCT/EP2018/077626 2018.10.10
- International Announcement: WO2019/072927A 2019.04.18
- Date entered country: 2020-04-07
- Main IPC: G01S7/481
- IPC: G01S7/481 ; G01S17/10 ; H01L31/0203 ; H01L31/0232 ; H01L31/173 ; H01L31/18 ; G01S7/48 ; G01S7/4865

Abstract:
A method for fabricating a plurality of Time-of-Flight sensor devices (1) comprises a step of providing a wafer (100) including a plurality of wafer portions (110) for a respective one of the Time-of-Flight sensor devices (1), wherein each of the wafer portions (110) includes a first light detecting area (10) and a second light detecting area (20) and a respective light emitter device (30). The respective light emitter device (30) and the respective first light detecting area (10) is encapsulated by a first volume (40) of a light transparent material (130), and the respective second light detecting area (20) is encapsulated by a second volume (50) of the light transparent material (130). Before singulation of the devices (1), an opaque material (60) is placed on the wafer portions (110) in a space (120) between the respective first and second volume (40, 50) of the light transparent material (130).
Public/Granted literature
- US20200333442A1 METHOD FOR FABRICATING A PLURALITY OF TIME-OF-FLIGHT SENSOR DEVICES Public/Granted day:2020-10-22
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