Invention Grant
- Patent Title: Static random access memory using vertical transport field effect transistors
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Application No.: US17381462Application Date: 2021-07-21
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Publication No.: US11678475B2Publication Date: 2023-06-13
- Inventor: Tsung-Sheng Kang , Ardasheir Rahman , Tao Li , Albert M. Young
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Samuel Waldbaum
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L29/78 ; H01L23/528 ; H01L27/092

Abstract:
A memory device includes a first field effect transistor (FET) stack on a first bottom source/drain region, which includes a first vertical transport field effect transistor (VTFET) device between a second VTFET device and the first source/drain region, and a second FET stack on a second bottom source/drain region, which includes a third VTFET device between a fourth VTFET device and the bottom source/drain region. The memory device includes a third FET stack on a third bottom source/drain region, which includes a fifth VTFET between a sixth VTFET and the third source/drain region, which is laterally adjacent to the first and second source/drain regions. The memory device includes a first electrical connection interconnecting a gate structure of the third VTFET with a gate structure of the fifth VTFET, and a second electrical connection interconnecting a gate structure of the second VTFET with a gate structure of the sixth VTFET.
Public/Granted literature
- US20230027780A1 STATIC RANDOM ACCESS MEMORY USING VERTICAL TRANSPORT FIELD EFFECT TRANSISTORS Public/Granted day:2023-01-26
Information query
IPC分类: