Digital demodulator and complex compensator for MEMS gyroscope
Abstract:
A micro electro-mechanical system (MEMS) gyroscope may include a suspended spring-mass system, and processing circuitry configured to receive a drive sense signal and a proof mass sense signal generated by the spring-mass system. The processing circuitry may be configured to derive a drive velocity in-phase signal from a drive displacement in-phase signal and to derive a drive velocity quadrature signal from a drive displacement quadrature signal. A compensated in-phase signal and a compensated quadrature signal may be determined based upon at least the drive displacement in-phase signal, the drive displacement quadrature signal, the drive velocity in-phase signal, the drive velocity quadrature signal, the sense displacement in-phase signal, and the sense displacement quadrature signal.
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