公开(公告)号：US20220397395A1

公开(公告)日：2022-12-15

申请号：US17344525

申请日：2021-06-10

Applicant: INVENSENSE, INC.

Inventor： Vito Avantaggiati

IPC: G01C19/5776 ,  G01P15/08

Abstract: Methods and systems for compensation of a microelectromechanical system (MEMS) sensor may include associating test temperature values with input test signal values, identifying temperature-input signal pairs, and applying one of the test temperature values and one of the test signal values to the MEMS sensor. Desired output signal values may be determined, with each of the desired output signal values corresponding to one of the applied temperature-input signal pairs. Measured output signal values from the MEMS sensor may be measured, with each of the measured output signal values corresponding to one of the applied temperature-input signal pairs. Compensation terms may be determined based on the plurality of temperature-input signal pairs, the corresponding plurality of measured output signal values, and the corresponding plurality of desired output signal values. Compensation terms may be used to modify a sense signal of the MEMS sensor.

公开(公告)号：US20220057209A1

公开(公告)日：2022-02-24

申请号：US17443806

申请日：2021-07-27

Applicant: InvenSense, Inc.

Inventor： Vito Avantaggiati

IPC: G01C19/5712

Abstract: A micro electro-mechanical system (MEMS) gyroscope may include a suspended spring-mass system, and processing circuitry configured to receive a drive sense signal and a proof mass sense signal generated by the spring-mass system. The processing circuitry may be configured to derive a drive velocity in-phase signal from a drive displacement in-phase signal and to derive a drive velocity quadrature signal from a drive displacement quadrature signal. A compensated in-phase signal and a compensated quadrature signal may be determined based upon at least the drive displacement in-phase signal, the drive displacement quadrature signal, the drive velocity in-phase signal, the drive velocity quadrature signal, the sense displacement in-phase signal, and the sense displacement quadrature signal.

公开(公告)号：US20210364546A1

公开(公告)日：2021-11-25

申请号：US16881732

申请日：2020-05-22

Applicant: INVENSENSE, INC.

Inventor： Kevin Hughes ,  Giacomo Laghi ,  Vito Avantaggiati

IPC: G01P21/00 ,  G01P15/125

Abstract: A MEMS accelerometer includes proof masses that move in-phase in response to a sensed linear acceleration. Self-test drive circuitry imparts an out-of-phase movement onto the proof masses. The motion of the proof masses in response to the linear acceleration and the self-test movement is sensed as a sense signal on common sense electrodes. Processing circuitry extracts from a linear acceleration signal corresponding to the in-phase movement due to linear acceleration and a self-test signal corresponding to the out-of-phase movement due to the self-test drive signal.

公开(公告)号：US12270652B2

公开(公告)日：2025-04-08

申请号：US17986598

申请日：2022-11-14

Applicant: InvenSense, Inc.

Inventor： Vito Avantaggiati ,  Carlo Pinna ,  Federico Mazzarella

IPC: G01C19/5649 ,  G01C19/5656 ,  G01C19/5776 ,  G01C25/00

Abstract: An algorithm and architecture for sense transfer function estimation injects one or more test signals from a signal generator into a MEMS gyroscope to detect an output signal (e.g., proof mass output sense signal), including an in-phase (e.g., Coriolis) component and a quadrature component. The in-phase and quadrature components are encoded with reference signals to determine phase and/or gain variation and are processed via a variety of components (e.g., matrix rotation, digital gain, tones demodulator, transfer function errors estimation, etc.) to estimate a sense transfer function of the MEMS (e.g., Hs(fd)) and corresponding phase and/or gain offset of Hs(fd). The in-phase and quadrature components are also compensated for phase and/or gain offset by system components.

公开(公告)号：US11619492B2

公开(公告)日：2023-04-04

申请号：US17344525

申请日：2021-06-10

Applicant: INVENSENSE, INC.

Inventor： Vito Avantaggiati

IPC: G01C19/5776 ,  G01P15/08

Abstract: Methods and systems for compensation of a microelectromechanical system (MEMS) sensor may include associating test temperature values with input test signal values, identifying temperature-input signal pairs, and applying one of the test temperature values and one of the test signal values to the MEMS sensor. Desired output signal values may be determined, with each of the desired output signal values corresponding to one of the applied temperature-input signal pairs. Measured output signal values from the MEMS sensor may be measured, with each of the measured output signal values corresponding to one of the applied temperature-input signal pairs. Compensation terms may be determined based on the plurality of temperature-input signal pairs, the corresponding plurality of measured output signal values, and the corresponding plurality of desired output signal values. Compensation terms may be used to modify a sense signal of the MEMS sensor.

公开(公告)号：US20220229086A1

公开(公告)日：2022-07-21

申请号：US17695077

申请日：2022-03-15

Applicant: INVENSENSE, INC.

Inventor： Kevin Hughes ,  Giacomo Laghi ,  Vito Avantaggiati

IPC: G01P21/00 ,  G01P15/125

Abstract: A MEMS accelerometer includes proof masses that move in-phase in response to a sensed linear acceleration. Self-test drive circuitry imparts an out-of-phase movement onto the proof masses. The motion of the proof masses in response to the linear acceleration and the self-test movement is sensed as a sense signal on common sense electrodes. Processing circuitry extracts from a linear acceleration signal corresponding to the in-phase movement due to linear acceleration and a self-test signal corresponding to the out-of-phase movement due to the self-test drive signal.

公开(公告)号：US11307218B2

公开(公告)日：2022-04-19

申请号：US16881732

申请日：2020-05-22

Applicant: INVENSENSE, INC.

Inventor： Kevin Hughes ,  Giacomo Laghi ,  Vito Avantaggiati

IPC: G01P21/00 ,  G01P15/125 ,  G01P15/08

Abstract: A MEMS accelerometer includes proof masses that move in-phase in response to a sensed linear acceleration. Self-test drive circuitry imparts an out-of-phase movement onto the proof masses. The motion of the proof masses in response to the linear acceleration and the self-test movement is sensed as a sense signal on common sense electrodes. Processing circuitry extracts from a linear acceleration signal corresponding to the in-phase movement due to linear acceleration and a self-test signal corresponding to the out-of-phase movement due to the self-test drive signal.

公开(公告)号：US11125580B1

公开(公告)日：2021-09-21

申请号：US16874418

申请日：2020-05-14

Applicant: INVENSENSE, INC.

Inventor： Vito Avantaggiati ,  Adolfo Giambastiani

IPC: G01C19/5712 ,  G01C25/00

Abstract: A MEMS inertial sensor may include drive electrodes that apply a drive signal to a suspended spring-mass system for measurement of an inertial linear or angular force and self-test electrodes that apply a self-test signal to the suspended spring-mass system for monitoring the characteristics of the suspended spring-mass system during operation. The self-test signal may be modulated by a spreading sequence that prevents interference with the self-test signal by vibrations and other disturbance signals. The self-test signals and drive signals may be modulated with CDMA code sequences to multiplex signals that are at least partially processed by a common sense path.

公开(公告)号：US11789036B2

公开(公告)日：2023-10-17

申请号：US17695077

申请日：2022-03-15

Applicant: INVENSENSE, INC.

Inventor： Kevin Hughes ,  Giacomo Laghi ,  Vito Avantaggiati

IPC: G01P21/00 ,  G01P15/125 ,  G01P15/08

CPC classification number: G01P21/00 ,  G01P15/125 ,  G01P2015/0868

Abstract: A MEMS accelerometer includes proof masses that move in-phase in response to a sensed linear acceleration. Self-test drive circuitry imparts an out-of-phase movement onto the proof masses. The motion of the proof masses in response to the linear acceleration and the self-test movement is sensed as a sense signal on common sense electrodes. Processing circuitry extracts from a linear acceleration signal corresponding to the in-phase movement due to linear acceleration and a self-test signal corresponding to the out-of-phase movement due to the self-test drive signal.

公开(公告)号：US11680798B2

公开(公告)日：2023-06-20

申请号：US17443806

申请日：2021-07-27

Applicant: InvenSense, Inc.

Inventor： Vito Avantaggiati

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A micro electro-mechanical system (MEMS) gyroscope may include a suspended spring-mass system, and processing circuitry configured to receive a drive sense signal and a proof mass sense signal generated by the spring-mass system. The processing circuitry may be configured to derive a drive velocity in-phase signal from a drive displacement in-phase signal and to derive a drive velocity quadrature signal from a drive displacement quadrature signal. A compensated in-phase signal and a compensated quadrature signal may be determined based upon at least the drive displacement in-phase signal, the drive displacement quadrature signal, the drive velocity in-phase signal, the drive velocity quadrature signal, the sense displacement in-phase signal, and the sense displacement quadrature signal.