Invention Grant
- Patent Title: Retaining ring having inner surfaces with facets
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Application No.: US17242162Application Date: 2021-04-27
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Publication No.: US11682561B2Publication Date: 2023-06-20
- Inventor: Jeonghoon Oh , Steven M. Zuniga , Andrew J. Nagengast , Samuel Chu-Chiang Hsu , Gautam Shashank Dandavate
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: H01L21/321
- IPC: H01L21/321 ; B24B41/06 ; B24B37/04 ; B24B37/32 ; H01L21/306 ; H01L21/304 ; B24B37/10
Abstract:
A retaining ring comprises a generally annular body. The body comprises a top surface, a bottom surface, an outer surface connected to the top surface at an outer top perimeter and the bottom surface at an outer bottom perimeter, and an inner surface connected to the top surface at an inner top perimeter and the bottom surface at an inner bottom perimeter. The inner surface comprises seven or more planar facets. Adjacent planar facets are connected at corners. The inner bottom perimeter comprises straight edges of the planar facets connected at the corners.
Public/Granted literature
- US20210249276A1 Retaining Ring Having Inner Surfaces with Facets Public/Granted day:2021-08-12
Information query
IPC分类:
