Invention Grant
- Patent Title: CMOS ultrasonic transducers and related apparatus and methods
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Application No.: US17086311Application Date: 2020-10-30
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Publication No.: US11684949B2Publication Date: 2023-06-27
- Inventor: Jonathan M. Rothberg , Keith G. Fife , Tyler S. Ralston , Gregory L. Charvat , Nevada J. Sanchez
- Applicant: BFLY Operations, Inc.
- Applicant Address: US CT Guilford
- Assignee: BFLY OPERATIONS, INC.
- Current Assignee: BFLY OPERATIONS, INC.
- Current Assignee Address: US MA Burlington
- Agency: Osha Bergman Watanabe & Burton LLP
- Main IPC: B06B1/02
- IPC: B06B1/02 ; B81B3/00 ; B81C1/00 ; G10K11/18 ; G10K9/12 ; B81B7/00

Abstract:
CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.
Public/Granted literature
- US20210114060A1 CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS Public/Granted day:2021-04-22
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