- 专利标题: Dual self-aligned gate endcap (SAGE) architectures
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申请号: US17526986申请日: 2021-11-15
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公开(公告)号: US11688792B2公开(公告)日: 2023-06-27
- 发明人: Sairam Subramanian , Walid M. Hafez , Sridhar Govindaraju , Mark Liu , Szuya S. Liao , Chia-Hong Jan , Nick Lindert , Christopher Kenyon
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt, P.C.
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/06 ; H01L27/088 ; H01L21/8234 ; H01L21/762 ; H01L21/768
摘要:
Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.
公开/授权文献
- US20220077302A1 DUAL SELF-ALIGNED GATE ENDCAP (SAGE) ARCHITECTURES 公开/授权日:2022-03-10
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