Invention Grant
- Patent Title: Cascaded sensing circuits for detecting and monitoring cracks in an integrated circuit
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Application No.: US17519742Application Date: 2021-11-05
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Publication No.: US11693048B2Publication Date: 2023-07-04
- Inventor: Nicholas A. Polomoff , Dewei Xu , Eric D. Hunt-Schroeder
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Agency: Hoffman Warnick LLC
- Agent David Cain
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
Embodiments of the disclosure provide a crack detecting and monitoring system, including: a plurality of electrically conductive structures extending about a protective barrier formed in an inactive region of an integrated circuit (IC), wherein an active region of the IC is enclosed within the protective barrier; and a plurality of stages of sensing circuits connected in series for sensing a change in an electrical characteristic of each of the plurality of structures and for receiving an enable signal, wherein each sensing circuit is coupled to a respective structure of the plurality of structures, the change in the electrical characteristic indicating damage to the respective structure, wherein each sensing circuit includes a circuit for selectively generating the enable signal for a next sensing circuit in the plurality of stages of sensing circuits.
Public/Granted literature
- US20220057445A1 CASCADED SENSING CIRCUITS FOR DETECTING AND MONITORING CRACKS IN AN INTEGRATED CIRCUIT Public/Granted day:2022-02-24
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