Invention Grant
- Patent Title: Isolation schemes for gate-all-around transistor devices
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Application No.: US17722142Application Date: 2022-04-15
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Publication No.: US11705518B2Publication Date: 2023-07-18
- Inventor: Rishabh Mehandru , Stephen M. Cea , Biswajeet Guha , Tahir Ghani , William Hsu
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/761 ; H01L21/762 ; H01L29/06 ; H01L29/423 ; H01L29/66

Abstract:
Isolation schemes for gate-all-around (GAA) transistor devices are provided herein Integrated circuit structures including increased transistor source/drain contact area using a sacrificial source/drain layer are provided herein. In some cases, the isolation schemes include changing the semiconductor nanowires/nanoribbons in a targeted channel region between active or functional transistor devices to electrically isolate those active devices. The targeted channel region is referred to herein as a dummy channel region, as it is not used as an actual channel region for an active or functional transistor device. The semiconductor nanowires/nanoribbons in the dummy channel region can be changed by converting them to an electrical insulator and/or by adding dopant that is opposite in type relative to surrounding source/drain material (to create a p-n junction). The isolation schemes described herein enable neighboring active devices to retain strain in the nanowires/nanoribbons of their channel regions, thereby improving device performance.
Public/Granted literature
- US20220246759A1 ISOLATION SCHEMES FOR GATE-ALL-AROUND TRANSISTOR DEVICES Public/Granted day:2022-08-04
Information query
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