- 专利标题： Substrates having a broadband antireflection layer and methods of forming a broadband antireflection layer
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申请号： US16956029申请日： 2018-12-18
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公开(公告)号： US11705527B2公开(公告)日： 2023-07-18
- 发明人: Peng Jiang , Zhuxiao Gu , Ruwen Tan
- 申请人： University of Florida Research Foundation, Inc.
- 申请人地址： US FL Gainesville
- 专利权人： University of Florida Research Foundation, Inc.
- 当前专利权人： University of Florida Research Foundation, Inc.
- 当前专利权人地址： US FL Gainesville
- 代理机构： Thomas|Horstemeyer, LLP
- 国际申请： PCT/US2018/066234 2018.12.18
- 国际公布： WO2019/126171A 2019.06.27
- 进入国家日期： 2020-06-19
- 主分类号： H01L31/18
- IPC分类号： H01L31/18 ; G02B1/118 ; H01L31/0216
摘要：
Embodiments of the present disclosure provide for methods of making substrates having an (AR) antireflective layer, substrates having an antireflective layer, devices including a substrate having an antireflective layer, and the like. The AR layer can have a total specular reflection of less than 10% at a wavelength of about 400-800 nm, and a height of about 500-1000 nm.
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