Invention Grant
- Patent Title: Substrates having a broadband antireflection layer and methods of forming a broadband antireflection layer
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Application No.: US16956029Application Date: 2018-12-18
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Publication No.: US11705527B2Publication Date: 2023-07-18
- Inventor: Peng Jiang , Zhuxiao Gu , Ruwen Tan
- Applicant: University of Florida Research Foundation, Inc.
- Applicant Address: US FL Gainesville
- Assignee: University of Florida Research Foundation, Inc.
- Current Assignee: University of Florida Research Foundation, Inc.
- Current Assignee Address: US FL Gainesville
- Agency: Thomas|Horstemeyer, LLP
- International Application: PCT/US2018/066234 2018.12.18
- International Announcement: WO2019/126171A 2019.06.27
- Date entered country: 2020-06-19
- Main IPC: H01L31/18
- IPC: H01L31/18 ; G02B1/118 ; H01L31/0216
Abstract:
Embodiments of the present disclosure provide for methods of making substrates having an (AR) antireflective layer, substrates having an antireflective layer, devices including a substrate having an antireflective layer, and the like. The AR layer can have a total specular reflection of less than 10% at a wavelength of about 400-800 nm, and a height of about 500-1000 nm.
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