- 专利标题: Microelectronic devices with a polysilicon structure adjacent a staircase structure, and related methods
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申请号: US17443616申请日: 2021-07-27
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公开(公告)号: US11710710B2公开(公告)日: 2023-07-25
- 发明人: Jivaan Kishore Jhothiraman , John M. Meldrim , Lifang Xu
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: TraskBritt
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/522 ; H01L23/528 ; H01L23/535 ; H01L21/768 ; H10B41/27 ; H10B41/35 ; H10B41/41 ; H10B43/27 ; H10B43/35 ; H10B43/40
摘要:
Microelectronic devices include a stack structure of insulative structures vertically alternating with conductive structures and arranged in tiers forming opposing staircase structures. A polysilicon fill material substantially fills an opening (e.g., a high-aspect-ratio opening) between the opposing staircase structures. The polysilicon fill material may have non-compressive stress such that the stack structure may be partitioned into blocks without the blocks bending and without contacts—formed in at least one of the polysilicon fill material and the stack structure—deforming, misaligning, or forming electrical shorts with neighboring contacts.
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