- 专利标题: Laser processing method
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申请号: US15956094申请日: 2018-04-18
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公开(公告)号: US11712757B2公开(公告)日: 2023-08-01
- 发明人: Kaori Tateishi , Yasushi Ito
- 申请人: Via Mechanics, Ltd.
- 申请人地址: JP Kanagawa
- 专利权人: VIA MECHANICS, LTD.
- 当前专利权人: VIA MECHANICS, LTD.
- 当前专利权人地址: JP Kanagawa-ken
- 代理机构: Nixon Peabody LLP
- 优先权: JP 17092137 2017.05.08
- 主分类号: B23K26/386
- IPC分类号: B23K26/386 ; B23K26/40 ; C03C15/00 ; C03C23/00 ; B23K26/18 ; B23K26/384 ; B23K26/0622 ; B23K26/402 ; B23K26/382 ; B23K103/00
摘要:
Provided is a laser processing method for drilling a hole in a glass substrate with using a carbon dioxide laser, including the steps of: irradiating the laser onto a drilling position on the glass substrate from a side of the glass substrate on which a protective sheet is adhered so as to form a blind hole; removing the protective sheet from the glass substrate and performing an annealing treatment; and performing a wet-etching process on a side of the glass substrate not irradiated with the laser so as to convert the blind hole into a through hole.
公开/授权文献
- US20180318965A1 LASER PROCESSING METHOD 公开/授权日:2018-11-08
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