Invention Grant
- Patent Title: Evaporator, deposition arrangement, deposition apparatus and methods of operation thereof
-
Application No.: US16180800Application Date: 2018-11-05
-
Publication No.: US11713506B2Publication Date: 2023-08-01
- Inventor: Stefan Keller , Uwe Schüssler , Jose Manuel Dieguez-Campo , Stefan Bangert , Byung-Sung Kwak
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Priority: EP 198683 2012.12.20
- The original application number of the division: US14650267
- Main IPC: C23C16/448
- IPC: C23C16/448 ; C23C14/24 ; H01M4/38 ; C23C14/54 ; C23C14/14 ; C23C16/06 ; C23C16/455 ; C23C16/52

Abstract:
A depositing arrangement for evaporation of a material is disclosed herein. The depositing arrangement has an alkali metal or alkaline earth metal for deposition of the material on a substrate. The deposition arrangement has a first chamber configured for liquefying the material; a valve being in fluid communication with the first chamber, and being downstream of the first chamber, wherein the valve is configured for control of the flow rate of the liquefied material through the valve. The deposition arrangement has an evaporation zone being in fluid communication with the valve, and being downstream of the valve, wherein the evaporation zone is configured for vaporizing the liquefied material; a heating unit to heat the material to higher temperatures before providing the liquid material in the evaporation zone; and one or more outlets for directing the vaporized material towards the substrate.
Public/Granted literature
- US20190071772A1 EVAPORATOR, DEPOSITION ARRANGEMENT, DEPOSITION APPARATUS AND METHODS OF OPERATION THEREOF Public/Granted day:2019-03-07
Information query
IPC分类: