Invention Grant
- Patent Title: Reactor for coating particles in stationary chamber with rotating paddles
-
Application No.: US16855860Application Date: 2020-04-22
-
Publication No.: US11717800B2Publication Date: 2023-08-08
- Inventor: Jonathan Frankel , Colin C. Neikirk , Pravin K. Narwankar , Quoc Truong , Govindraj Desai , Sekar Krishnasamy
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B01J8/10
- IPC: B01J8/10 ; C23C16/44 ; B05D1/00 ; B01F27/70 ; B01F27/112 ; B01F101/22

Abstract:
A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.
Public/Granted literature
- US20200338517A1 Reactor for Coating Particles in Stationary Chamber with Rotating Paddles Public/Granted day:2020-10-29
Information query