Particle Coating Methods and Apparatus

    公开(公告)号:US20220186372A1

    公开(公告)日:2022-06-16

    申请号:US17590614

    申请日:2022-02-01

    IPC分类号: C23C16/455 A61K9/16 C23C16/44

    摘要: A reactor for coating particles includes a vacuum chamber configured to hold particles to be coated, a vacuum port to exhaust gas from the vacuum chamber via the outlet of the vacuum chamber, a chemical delivery system configured to flow a process gas into the particles via a gas inlet on the vacuum chamber, one or more vibrational actuators located on a first mounting surface of the vacuum chamber, and a controller configured to cause the one or more vibrational actuators to generate a vibrational motion in the vacuum chamber sufficient to induce a vibrational motion in the particles held within the vacuum chamber.

    GAS INJECTION FOR DE-AGGLOMERATION IN PARTICLE COATING REACTOR

    公开(公告)号:US20200340108A1

    公开(公告)日:2020-10-29

    申请号:US16855887

    申请日:2020-04-22

    IPC分类号: C23C16/44 C23C16/455

    摘要: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.