公开(公告)号：US20210378971A1

公开(公告)日：2021-12-09

申请号：US17341213

申请日：2021-06-07

申请人： Applied Materials, Inc.

发明人： Fei Wang ,  Miaojun Wang ,  Balaji Ganapathy ,  Jonathan Frankel ,  Shivkumar Chiruvolu ,  Pravin K. Narwankar

IPC分类号： A61K9/50 ,  A61K31/397 ,  A61K31/517 ,  A61K31/4422

摘要： A pharmaceutical composition containing a metal oxide coated particle comprising 1) an amorphous solid dispersion (ASD) core containing an active pharmaceutical ingredient (API) and a polymer; and 2) a metal oxide coating, and the method of making said metal oxide coated particle by atomic layer deposition (ALD). The metal oxide coated particle is useful because it prevents the ASD from crystallization and helps maintain the ASD in an amorphous form.

公开(公告)号：US20200338521A1

公开(公告)日：2020-10-29

申请号：US16855871

申请日：2020-04-22

申请人： Applied Materials, Inc.

发明人： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy

IPC分类号： B01J19/18 ,  B01F7/00 ,  B01F7/04 ,  B01J19/00

摘要： A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a curved inner surface of the half-cylinder.

公开(公告)号：US20200338008A1

公开(公告)日：2020-10-29

申请号：US16858439

申请日：2020-04-24

申请人： Applied Materials, Inc.

发明人： Fei Wang ,  Colin C. Neikirk ,  Jonathan Frankel ,  Pravin K. Narwankar

IPC分类号： A61K9/16

摘要： A method of preparing a pharmaceutical composition having a drug-containing core enclosed by one or more metal oxide materials is provided. The method includes the sequential atomic layer deposition of a metal oxide layer(s) followed by molecular level deposition of a polymer layer(s). This produces a pharmaceutical composition comprising a drug containing core enclosed by one or more metal oxide materials and one more polymer materials

公开(公告)号：US20140248754A1

公开(公告)日：2014-09-04

申请号：US13834508

申请日：2013-03-15

申请人： APPLIED MATERIALS INC.

发明人： Kiran V. Thadani ,  Jingjing Xu ,  Abhijit Basu Mallick ,  Joe Griffith Cruz ,  Nitin K. Ingle ,  Pravin K. Narwankar

IPC分类号： H01L21/20

CPC分类号： H01L21/2015 ,  C23C16/045 ,  C23C16/26 ,  C23C16/30 ,  C23C16/56 ,  H01J37/32357 ,  H01L21/02115 ,  H01L21/02126 ,  H01L21/0217 ,  H01L21/02271 ,  H01L21/02274 ,  H01L21/3105 ,  H01L21/764 ,  H01L21/7682 ,  H01L21/76837 ,  H01L2221/1047

摘要： A method of forming and controlling air gaps between adjacent raised features on a substrate includes forming a silicon-containing film in a bottom region between the adjacent raised features using a flowable deposition process. The method also includes forming carbon-containing material on top of the silicon-containing film and forming a second film over the carbon-containing material using a flowable deposition process. The second film fills an upper region between the adjacent raised features. The method also includes curing the materials at an elevated temperature for a period of time to form the air gaps between the adjacent raised features. The thickness and number layers of films can be used to control the thickness, vertical position and number of air gaps.

摘要翻译： 在衬底上形成和控制相邻凸起特征之间的空气间隙的方法包括：使用可流动沉积工艺在邻近凸起特征之间的底部区域中形成含硅膜。 该方法还包括在含硅膜的顶部上形成含碳材料，并使用可流动的沉积工艺在含碳材料上形成第二膜。 第二膜填充相邻凸起特征之间的上部区域。 该方法还包括在升高的温度下固化材料一段时间以形成相邻凸起特征之间的气隙。 膜的厚度和数量层可用于控制厚度，垂直位置和气隙数量。

公开(公告)号：US11761094B2

公开(公告)日：2023-09-19

申请号：US17313847

申请日：2021-05-06

申请人： Applied Materials, Inc.

发明人： David Britz ,  Pravin K. Narwankar ,  David Thompson ,  Yuriy Melnik ,  Sukti Chatterjee

IPC分类号： F01D5/28 ,  C23C28/00 ,  F01D5/18 ,  C23C16/455 ,  C23C16/52 ,  C23C28/04 ,  C23C16/40 ,  C23C14/08

CPC分类号： C23C28/3455 ,  C23C16/45525 ,  C23C16/52 ,  C23C28/3215 ,  C23C28/345 ,  F01D5/186 ,  F01D5/288 ,  C23C14/083 ,  C23C16/40 ,  C23C28/042 ,  F05D2230/31 ,  F05D2240/24 ,  F05D2260/95 ,  F05D2300/121 ,  F05D2300/132 ,  F05D2300/134 ,  Y10T428/2462

摘要： Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof and can have a thickness from 1 nm to 3,000 nm.

公开(公告)号：US11717800B2

公开(公告)日：2023-08-08

申请号：US16855860

申请日：2020-04-22

申请人： Applied Materials, Inc.

发明人： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy

IPC分类号： B01J8/10 ,  C23C16/44 ,  B05D1/00 ,  B01F27/70 ,  B01F27/112 ,  B01F101/22

CPC分类号： B01J8/10 ,  B01F27/112 ,  B01F27/70 ,  B05D1/60 ,  C23C16/4417 ,  B01F2101/22 ,  B01J2208/00867

摘要： A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.

公开(公告)号：US20230097519A1

公开(公告)日：2023-03-30

申请号：US17955431

申请日：2022-09-28

申请人： Applied Materials, Inc.

发明人： Fei Wang ,  Pravin K. Narwankar

IPC分类号： A61K9/50

摘要： This disclosure pertains to coated drug compositions and methods of preparing coated drug compositions with a low temperature silicon oxide coating. Specifically, the instant application discloses a method to coat active pharmaceutical ingredient particles using a silicon precursor and a catalyst at a low temperature.

公开(公告)号：US11242599B2

公开(公告)日：2022-02-08

申请号：US16515875

申请日：2019-07-18

申请人： Applied Materials, Inc.

发明人： Kaushal Gangakhedkar ,  Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar

IPC分类号： C23C16/44 ,  C23C16/455 ,  A61K9/16

摘要： A reactor for coating particles includes a vacuum chamber configured to hold particles to be coated, a vacuum port to exhaust gas from the vacuum chamber via the outlet of the vacuum chamber, a chemical delivery system configured to flow a process gas into the particles via a gas inlet on the vacuum chamber, one or more vibrational actuators located on a first mounting surface of the vacuum chamber, and a controller configured to cause the one or more vibrational actuators to generate a vibrational motion in the vacuum chamber sufficient to induce a vibrational motion in the particles held within the vacuum chamber.

公开(公告)号：US20200338517A1

公开(公告)日：2020-10-29

申请号：US16855860

申请日：2020-04-22

申请人： Applied Materials, Inc.

发明人： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy

IPC分类号： B01J8/10 ,  B01F7/04 ,  B01F7/00 ,  B05D1/00 ,  C23C16/44

摘要： A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.

公开(公告)号：US10794853B2

公开(公告)日：2020-10-06

申请号：US15833552

申请日：2017-12-06

申请人： APPLIED MATERIALS, INC.

发明人： Colin Neikirk ,  Yuriy Melnik ,  Pravin K. Narwankar

IPC分类号： G01N27/414 ,  C23C16/46 ,  C23C16/52 ,  H01L23/29 ,  H01L21/56 ,  H01L21/285 ,  H01L21/312 ,  H01L21/47 ,  H01L21/02 ,  C23C16/448

摘要： The present disclosure relates to a method of depositing a polymer layer, including: providing a substrate, having a sensor structure disposed on the substrate, to a substrate support within a hot wire chemical vapor deposition (HWCVD) chamber; providing a process gas comprising an initiator gas and a monomer gas and a carrier gas to the HWCVD chamber; heating a plurality of filaments disposed in the HWCVD chamber to a first temperature sufficient to activate the initiator gas without decomposing the monomer gas; and exposing the substrate to initiator radicals from the activated initiator gas and to the monomer gas to deposit a polymer layer atop the sensor structure.