Invention Grant
- Patent Title: Information processing apparatus, film forming apparatus, method of manufacturing article, and non-transitory computer-readable storage medium
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Application No.: US17380087Application Date: 2021-07-20
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Publication No.: US11721011B2Publication Date: 2023-08-08
- Inventor: Takahiro Nakayama , Yuichiro Oguchi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP 20127639 2020.07.28
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06F3/14 ; H04N7/18 ; G06V40/20

Abstract:
The present invention provides an information processing apparatus comprising: an obtainer configured to, in a process of supplying a curable composition onto a substrate or a mold and forming a film of the curable composition in a space between the substrate and the mold, obtain the captured image of the curable composition; a generator configured to generate a predicted image representing a prediction result of a behavior of the curable composition on the substrate in the process; and a display controller configured to display, on a display unit, the captured image and the predicted image to be comparable to each other.
Public/Granted literature
Information query