- 专利标题: Electronic device including a gate structure and a process of forming the same
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申请号: US17172243申请日: 2021-02-10
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公开(公告)号: US11721736B2公开(公告)日: 2023-08-08
- 发明人: Aurore Constant , Joris Baele
- 申请人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 申请人地址: US AZ Phoenix
- 专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人地址: US AZ Scottsdale
- 代理机构: Abel Schillinger, LLP
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L29/66 ; H01L29/778
摘要:
An electronic device can include a gate structure. In an embodiment, the gate structure can include a gate electrode including a doped semiconductor material, a metal-containing member, a pair of conductive sidewall spacers. The first metal-containing member can overlie the gate electrode. The conductive sidewall spacers can overlie the gate electrode and along opposite sides of the first metal-containing member. In another embodiment, the gate structure can include a gate electrode, a first metal-containing member overlying the gate electrode, and a second metal-containing member overlying the first metal-containing member. The first metal-containing member can have a length that is greater than the length of the second metal-containing member and substantially the same length as the gate electrode.
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