- 专利标题: Deposition system and method
-
申请号: US16994267申请日: 2020-08-14
-
公开(公告)号: US11728226B2公开(公告)日: 2023-08-15
- 发明人: Wen-Hao Cheng , Hsuan-Chih Chu , Yen-Yu Chen , Yi-Ming Dai
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Seed Intellectual Property Law Group LLP
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; C23C14/35 ; C23C14/54 ; H01J37/32 ; H01J37/34
摘要:
A deposition system provides a feature that may reduce costs of the sputtering process by increasing a target change interval. The deposition system provides an array of magnet members which generate a magnetic field and redirect the magnetic field based on target thickness measurement data. To adjust or redirect the magnetic field, at least one of the magnet members in the array tilts to focus on an area of the target where more target material remains than other areas. As a result, more ion, e.g., argon ion bombardment occurs on the area, creating more uniform erosion on the target surface.
信息查询
IPC分类: