Invention Grant
- Patent Title: Die stitching and harvesting of arrayed structures
-
Application No.: US17133096Application Date: 2020-12-23
-
Publication No.: US11728266B2Publication Date: 2023-08-15
- Inventor: Sanjay Dabral , Jun Zhai , Kunzhong Hu , Raymundo M. Camenforte
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Aikin & Gallant, LLP
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/58 ; H01L25/18 ; H01L23/00

Abstract:
Multi-die structures with die-to-die routing are described. In an embodiment, each die is patterned into the same semiconductor substrate, and the dies may be interconnected with die-to-die routing during back-end wafer processing. Partial metallic seals may be formed to accommodate the die-to-die routing, programmable dicing, and various combinations of full metallic seals and partial metallic seals can be formed. This may also be extended to three dimensional structures formed using wafer-on-wafer or chip-on-wafer techniques.
Public/Granted literature
- US20220199517A1 DIE STITCHING AND HARVESTING OF ARRAYED STRUCTURES Public/Granted day:2022-06-23
Information query
IPC分类: