Invention Grant
- Patent Title: Capacitor structure including bonding pads as electrodes and methods of forming the same
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Application No.: US17317442Application Date: 2021-05-11
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Publication No.: US11728305B2Publication Date: 2023-08-15
- Inventor: Shiqian Shao , Fumiaki Toyama , Peter Rabkin
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/00 ; H01L25/18 ; H01L49/02 ; H01L25/00

Abstract:
A semiconductor structure includes a bonded assembly of a first semiconductor die including first metal bonding pads and a second semiconductor die including second metal bonding pads, and a capacitor structure including a first electrode, a second electrode, and a node dielectric. The first electrode includes first bonded pairs of metal bonding pads. The second electrode includes second bonded pairs of metal bonding pads. The node dielectric includes portions dielectric material layers laterally surrounding the metal bonding pads.
Public/Granted literature
- US20220367393A1 CAPACITOR STRUCTURE INCLUDING BONDING PADS AS ELECTRODES AND METHODS OF FORMING THE SAME Public/Granted day:2022-11-17
Information query
IPC分类: