Invention Grant
- Patent Title: Metal plate for deposition mask, and deposition mask and manufacturing method therefor
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Application No.: US17574128Application Date: 2022-01-12
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Publication No.: US11732364B2Publication Date: 2023-08-22
- Inventor: Dong Mug Seong , Jong Min Yun , Su Hyeon Cho , Hae Sik Kim , Tae Hoon Han , Hyo Won Son , Sang Yu Lee , Sang Beum Lee
- Applicant: LG INNOTEK CO., LTD.
- Applicant Address: KR Seoul
- Assignee: LG INNOTEK CO., LTD.
- Current Assignee: LG INNOTEK CO., LTD.
- Current Assignee Address: KR Seoul
- Agency: KED & Associates LLP
- Priority: KR 20160118389 2016.09.13 KR 20170014643 2017.02.01
- Main IPC: H10K71/16
- IPC: H10K71/16 ; C23C14/04 ; C23F1/02 ; H01L21/027 ; H01L21/203 ; H01L21/475 ; H10K71/00 ; H10K99/00 ; C23F1/28

Abstract:
A metal plate to be used in the manufacture of a deposition mask comprises: a base metal plate; and a surface layer disposed on the base metal plate, wherein the surface layer includes elements different from those of the base metal plate, or has a composition ratio different from that of the base metal plate, and an etching rate of the base metal plate is greater than the etching rate of the surface layer. An embodiment includes a manufacturing method for a deposition mask having an etching factor greater than or equal to 2.5. The deposition mask of the embodiment includes a deposition pattern region and a non-deposition region, the deposition pattern region includes a plurality of through-holes, the deposition pattern region is divided into an effective region, a peripheral region, and a non-effective region, and through-holes can be formed in the effective region and the peripheral region.
Public/Granted literature
- US20220149283A1 METAL PLATE FOR DEPOSITION MASK, AND DEPOSITION MASK AND MANUFACTURING METHOD THEREFOR Public/Granted day:2022-05-12
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