Invention Grant
- Patent Title: Search device, search program, and plasma processing apparatus
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Application No.: US17272479Application Date: 2019-12-03
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Publication No.: US11747774B2Publication Date: 2023-09-05
- Inventor: Yutaka Okuyama , Takeshi Ohmori
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: MILES & STOCKBRIDGE P.C.
- International Application: PCT/JP2019/047126 2019.12.03
- International Announcement: WO2021/111511A 2021.06.10
- Date entered country: 2021-03-01
- Main IPC: G05B13/04
- IPC: G05B13/04 ; H05H1/24

Abstract:
A parameter compression unit compresses first input parameter values so that a parameter restoration unit can restore the first input parameter values, and generates first compressed input parameter values in which the number of control parameters is reduced, a model learning unit learns a prediction model from learning data that is a set of the first compressed input parameter values and first output parameter values that are processing results obtained by giving the first input parameter values, as a plurality of control parameters, to a processing device, and a processing condition search unit estimates a second compressed input parameter values corresponding to target output parameter values by using the prediction model.
Public/Granted literature
- US20220291646A1 SEARCH DEVICE, SEARCH PROGRAM, AND PLASMA PROCESSING APPARATUS Public/Granted day:2022-09-15
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