Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17369320Application Date: 2021-07-07
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Publication No.: US11751378B2Publication Date: 2023-09-05
- Inventor: Hyungeun Choi , Kiseok Lee , Seungjae Jung , Joongchan Shin , Taehyun An , Moonyoung Jeong , Sangyeon Han
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20200166970 2020.12.02
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L29/08

Abstract:
A semiconductor memory device includes: a bit line extending on a substrate in a vertical direction; a transistor body part including a first source-drain region, a monocrystalline channel layer, and a second source-drain region that are sequentially arranged in a first horizontal direction and connected to the bit line; gate electrode layers extending in a second horizontal direction that is orthogonal to the first horizontal direction, with a gate dielectric layer between the gate electrode layers and the monocrystalline channel layer, and covering upper and lower surfaces of the monocrystalline channel layer; and a cell capacitor including a lower electrode layer, a capacitor dielectric layer, and an upper electrode layer at a side of the transistor body that is opposite to the bit line in the first horizontal direction and is connected to the second source-drain region.
Public/Granted literature
- US20220173106A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-06-02
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