Invention Grant
- Patent Title: Methods of forming microelectronic devices, and related microelectronic devices and electronic systems
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Application No.: US17463286Application Date: 2021-08-31
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Publication No.: US11751383B2Publication Date: 2023-09-05
- Inventor: Fatma Arzum Simsek-Ege
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L27/10
- IPC: H01L27/10 ; H10B12/00 ; H01L23/00 ; G11C5/06

Abstract:
A method of forming a microelectronic device comprises forming a microelectronic device structure comprising memory cells, digit lines, word lines, and isolation material. Contact structures are formed to extend through the isolation material. Some of the contact structures are coupled to some of the digit lines, and some other of the contact structures are coupled to some of the word lines. Air gaps are formed to be interposed between the contact structures and the isolation material. An additional microelectronic device structure comprising control logic devices and additional isolation material is formed. After forming the air gaps, the additional microelectronic device structure is attached to the microelectronic device structure. Additional contact structures are formed to extend through the additional isolation material and to the contact structures. The additional contact structures are in electrical communication with the control logic devices. Microelectronic devices, electronic systems, and additional methods are also described.
Public/Granted literature
- US20230060512A1 METHODS OF FORMING MICROELECTRONIC DEVICES, AND RELATED MICROELECTRONIC DEVICES AND ELECTRONIC SYSTEMS Public/Granted day:2023-03-02
Information query
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