Invention Grant
- Patent Title: FinFET transistor based resistive random access memory
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Application No.: US16141025Application Date: 2018-09-25
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Publication No.: US11751404B2Publication Date: 2023-09-05
- Inventor: Abhishek Sharma , Gregory Chen , Phil Knag , Ram Krishnamurthy , Raghavan Kumar , Sasikanth Manipatruni , Amrita Mathuriya , Huseyin Sumbul , Ian A. Young
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H10B63/00 ; H01L29/78 ; H01L29/66 ; H10N70/00

Abstract:
Embodiments herein describe techniques for a semiconductor device including a RRAM memory cell. The RRAM memory cell includes a FinFET transistor and a RRAM storage cell. The FinFET transistor includes a fin structure on a substrate, where the fin structure includes a channel region, a source region, and a drain region. An epitaxial layer is around the source region or the drain region. A RRAM storage stack is wrapped around a surface of the epitaxial layer. The RRAM storage stack includes a resistive switching material layer in contact and wrapped around the surface of the epitaxial layer, and a contact electrode in contact and wrapped around a surface of the resistive switching material layer. The epitaxial layer, the resistive switching material layer, and the contact electrode form a RRAM storage cell. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20200098826A1 FinFET TRANSISTOR BASED RESISTIVE RANDOM ACCESS MEMORY Public/Granted day:2020-03-26
Information query
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