Invention Grant
- Patent Title: Mask frame and deposition apparatus including the same
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Application No.: US17375228Application Date: 2021-07-14
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Publication No.: US11753711B2Publication Date: 2023-09-12
- Inventor: Jongyoon Lee , Seungjin Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: F. Chau & Associates, LLC
- Priority: KR 20200141198 2020.10.28
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/00 ; B05C21/00 ; H10K71/16

Abstract:
A mask frame includes a support substrate including a plurality of inner side surfaces. The plurality of inner side surfaces defines a first opening through the support substrate. A heat dissipation plate is disposed on the plurality of inner side surfaces. A plurality of fixing portions is disposed between the support substrate and the heat dissipation plate. The plurality of fixing portions includes a plurality of adhesive portions attaching the support substrate to the heat dissipation plate.
Public/Granted literature
- US20220127710A1 MASK FRAME AND DEPOSITION APPARATUS INCLUDING THE SAME Public/Granted day:2022-04-28
Information query
IPC分类: