Invention Grant
- Patent Title: Height measuring device, charged particle beam apparatus, and height measuring method
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Application No.: US17140302Application Date: 2021-01-04
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Publication No.: US11754388B2Publication Date: 2023-09-12
- Inventor: Yukinori Aida
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: THE WEBB LAW FIRM
- Priority: JP 20000798 2020.01.07
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/30 ; H01J37/317 ; G01B11/06

Abstract:
A height measuring device includes a light source that emits light in a direction oblique to a top surface of a specimen, a slit that shapes the light from the light source to form a slit image on the specimen, an imaging element that detects reflected light reflected by the specimen, and an arithmetic unit. The arithmetic unit: identifies a slit image of the reflected light reflected by the top surface of the specimen from among a plurality of slit images based on respective positions of the plurality of slit images on a detection surface of the imaging element; and determines the height of the top surface of the specimen based on the position of the slit image of the reflected light reflected by the top surface of the specimen on the detection surface.
Public/Granted literature
- US20210207945A1 Height Measuring Device, Charged Particle Beam Apparatus, and Height Measuring Method Public/Granted day:2021-07-08
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