公开(公告)号：US11754388B2

公开(公告)日：2023-09-12

申请号：US17140302

申请日：2021-01-04

Applicant: JEOL Ltd.

Inventor： Yukinori Aida

IPC: H01J37/20 ,  H01J37/30 ,  H01J37/317 ,  G01B11/06

CPC classification number: G01B11/0608 ,  H01J37/20 ,  H01J37/3007 ,  H01J37/3174 ,  H01J2237/032 ,  H01J2237/063 ,  H01J2237/10 ,  H01J2237/15 ,  H01J2237/202

Abstract: A height measuring device includes a light source that emits light in a direction oblique to a top surface of a specimen, a slit that shapes the light from the light source to form a slit image on the specimen, an imaging element that detects reflected light reflected by the specimen, and an arithmetic unit. The arithmetic unit: identifies a slit image of the reflected light reflected by the top surface of the specimen from among a plurality of slit images based on respective positions of the plurality of slit images on a detection surface of the imaging element; and determines the height of the top surface of the specimen based on the position of the slit image of the reflected light reflected by the top surface of the specimen on the detection surface.

公开(公告)号：US20230075825A1

公开(公告)日：2023-03-09

申请号：US17939425

申请日：2022-09-07

Applicant: JEOL Ltd.

Inventor： Yukinori Aida

IPC: H01J37/317 ,  H01J37/304

Abstract: Provided is a charged particle beam drawing apparatus including a measurement unit that scans a reference mark disposed on a stage with a charged particle beam to detect a position of the reference mark, and measures a positional deviation amount of the charged particle beam, based on the detected position; and a positional correction unit that corrects a drawing position based on the measured positional deviation amount. A plurality of the reference marks is disposed on the stage, and the measurement unit switches from one of the reference marks used for the measurement of the positional deviation amount to another one of the reference marks that is not used yet, when a predetermined condition has been satisfied.

公开(公告)号：US20210207945A1

公开(公告)日：2021-07-08

申请号：US17140302

申请日：2021-01-04

Applicant: JEOL Ltd.

Inventor： Yukinori Aida

IPC: G01B11/06 ,  H01J37/317 ,  H01J37/30 ,  H01J37/20

Abstract: A height measuring device includes a light source that emits light in a direction oblique to a top surface of a specimen, a slit that shapes the light from the light source to form a slit image on the specimen, an imaging element that detects reflected light reflected by the specimen, and an arithmetic unit. The arithmetic unit: identifies a slit image of the reflected light reflected by the top surface of the specimen from among a plurality of slit images based on respective positions of the plurality of slit images on a detection surface of the imaging element; and determines the height of the top surface of the specimen based on the position of the slit image of the reflected light reflected by the top surface of the specimen on the detection surface.