- 专利标题： Target measurement device and method for measuring a target
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申请号： US16906939申请日： 2020-06-19
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公开(公告)号： US11754691B2公开(公告)日： 2023-09-12
- 发明人: Pradip Girdhar Chaudhari , Che-Hui Lee , Chih-Cheng Wei , Wen-Cheng Yang , Chyi-Tsong Ni
- 申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 申请人地址： TW Hsinchu
- 专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人地址： TW Hsinchu
- 代理机构： WPAT LAW
- 代理商 Anthony King
- 主分类号： G01C3/08
- IPC分类号： G01C3/08 ; G01S7/497 ; G01S7/481 ; G01S17/06
摘要：
A target measurement device is provided. The target measurement device includes a fixing ring, a main body, and a transceiver. The fixing ring has a first surface. The main body is over the first surface of the fixing ring. The transceiver is coupled to the main body. The transceiver is at least movable between a center of the fixing ring to an edge of the fixing ring from a top view perspective. A method for measuring a target is also provided.
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