Invention Grant
- Patent Title: Three-dimensional memory device with via structures surrounded by perforated dielectric moat structure and methods of making the same
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Application No.: US17155512Application Date: 2021-01-22
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Publication No.: US11756877B2Publication Date: 2023-09-12
- Inventor: Kazuto Ohsawa , Kota Funayama , Hisaya Sakai , Yoshitaka Otsu
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: THE MARBURY LAW GROUP PLLC
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/522 ; H10B41/27 ; H10B43/27

Abstract:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory stack structures vertically extending through the alternating stack, a finned dielectric moat structure including a dielectric core portion vertically extending through each layer within the alternating stack and a vertical stack of dielectric fin portions laterally extending outward from the dielectric core portion, a vertical stack of insulating plates and dielectric material plates laterally surrounded by the finned dielectric moat structure, and an interconnection via structure vertically extending through the vertical stack and contacting a top surface of an underlying metal interconnect structure.
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Information query
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