- 专利标题: Radio-frequency (RF) integrated circuit (IC) (RFIC) packages employing a substrate sidewall partial shield for electro-magnetic interference (EMI) shielding, and related fabrication methods
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申请号: US16879517申请日: 2020-05-20
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公开(公告)号: US11756894B2公开(公告)日: 2023-09-12
- 发明人: Jeahyeong Han , Rajneesh Kumar , Jeongil Jay Kim , Chin-Kwan Kim
- 申请人: QUALCOMM Incorporated
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM INCORPORATED
- 当前专利权人: QUALCOMM INCORPORATED
- 当前专利权人地址: US CA San Diego
- 代理机构: Withrow & Terranova, PLLC
- 主分类号: H01L23/552
- IPC分类号: H01L23/552 ; H01L21/48 ; H01L23/498 ; H01L23/66 ; H01L23/00 ; H01Q1/22 ; H01Q1/52
摘要:
Radio-frequency (RF) integrated circuit (IC) (RFIC) packages employing a substrate sidewall partial shield for electro-magnetic interference (EMI) shielding. A RFIC package includes an IC die layer that includes a RFIC die(s) mounted on a substrate that includes substrate metallization layers, a substrate core, and substrate antenna layers. The RFIC package includes an EMI shield surrounding the IC die layer and extending down shared sidewalls of the IC die layer and the substrate. The EMI shield extends down the sidewalls of the IC die layer and substrate metallization layers of the substrate to at least the interface between the substrate metallization layers and the substrate core, and without extending adjacent to the sidewall of the substrate antenna layers. In this manner, antenna performance of the antenna module may not be degraded, because extending the EMI shield down sidewalls of the substrate antenna layers can create a resonance cavity in the substrate.
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