Invention Grant
- Patent Title: HEMT-compatible lateral rectifier structure
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Application No.: US17324471Application Date: 2021-05-19
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Publication No.: US11757005B2Publication Date: 2023-09-12
- Inventor: King-Yuen Wong , Ming-Wei Tsai , Han-Chin Chiu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US15959459 2018.04.23
- Main IPC: H01L29/20
- IPC: H01L29/20 ; H01L29/66 ; H01L29/778 ; H01L29/861 ; H01L29/205

Abstract:
The present disclosure, in some embodiments, relates to a semiconductor device. The semiconductor device includes an electron supply layer that is disposed over an upper surface of a semiconductor material and that is laterally arranged between a first conductive terminal and a second conductive terminal. A III-N (III-nitride) semiconductor material is disposed over the electron supply layer. A passivation layer is disposed over the III-N semiconductor material, along a side of the III-N semiconductor material, and over the electron supply layer. An insulating material is arranged over the passivation layer and along opposing sidewalls of the second conductive terminal, and a gate structure is disposed over the passivation layer. The passivation layer has an uppermost surface that is directly coupled to a sidewall of the passivation layer. The insulating material extends along the sidewall of the passivation layer.
Public/Granted literature
- US20210273059A1 HEMT-COMPATIBLE LATERAL RECTIFIER STRUCTURE Public/Granted day:2021-09-02
Information query
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