Invention Grant
- Patent Title: Nanowire structures having wrap-around contacts
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Application No.: US17072992Application Date: 2020-10-16
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Publication No.: US11757026B2Publication Date: 2023-09-12
- Inventor: Stephen M. Cea , Cory E. Weber , Patrick H. Keys , Seiyon Kim , Michael G. Haverty , Sadasivan Shankar
- Applicant: Google LLC
- Applicant Address: US CA Mountain View
- Assignee: Google LLC
- Current Assignee: Google LLC
- Current Assignee Address: US CA Mountain View
- Agency: Lerner David LLP
- Main IPC: H01L29/775
- IPC: H01L29/775 ; H01L29/66 ; B82Y10/00 ; H01L29/06 ; H01L29/417 ; H01L29/786 ; H01L29/78 ; H01L29/16 ; B82Y40/00

Abstract:
Nanowire structures having wrap-around contacts are described. For example, a nanowire semiconductor device includes a nanowire disposed above a substrate. A channel region is disposed in the nanowire. The channel region has a length and a perimeter orthogonal to the length. A gate electrode stack surrounds the entire perimeter of the channel region. A pair of source and drain regions is disposed in the nanowire, on either side of the channel region. Each of the source and drain regions has a perimeter orthogonal to the length of the channel region. A first contact completely surrounds the perimeter of the source region. A second contact completely surrounds the perimeter of the drain region.
Public/Granted literature
- US20210036137A1 NANOWIRE STRUCTURES HAVING WRAP-AROUND CONTACTS Public/Granted day:2021-02-04
Information query
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