Invention Grant
- Patent Title: Integrated optical sensor with pinned photodiodes
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Application No.: US17324619Application Date: 2021-05-19
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Publication No.: US11757054B2Publication Date: 2023-09-12
- Inventor: Didier Dutartre
- Applicant: STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Crolles
- Agency: CROWE & DUNLEVY
- Priority: FR 05537 2020.05.26
- Main IPC: H01L31/028
- IPC: H01L31/028 ; G01S7/4865 ; H01L27/146 ; H01L31/103

Abstract:
An integrated optical sensor is formed by a pinned photodiode. A semiconductor substrate includes a first semiconductor region having a first type of conductivity located between a second semiconductor region having a second type of conductivity opposite to the first type one and a third semiconductor region having the second type of conductivity. The third semiconductor region is thicker, less doped and located deeper in the substrate than the second semiconductor region. The third semiconductor region includes both silicon and germanium. In one implementation, the germanium within the third semiconductor region has at least one concentration gradient. In another implementation, the germanium concentration within the third semiconductor region is substantially constant.
Public/Granted literature
- US20210376170A1 INTEGRATED OPTICAL SENSOR WITH PINNED PHOTODIODES Public/Granted day:2021-12-02
Information query
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