Invention Grant
- Patent Title: Determining moving properties of a target in an extreme ultraviolet light source
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Application No.: US17416636Application Date: 2020-01-27
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Publication No.: US11758639B2Publication Date: 2023-09-12
- Inventor: Robert Jay Rafac
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: DiBerardino McGovern IP Group LLC
- International Application: PCT/EP2020/051867 2020.01.27
- International Announcement: WO2020/156975A 2020.08.06
- Date entered country: 2021-06-21
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G01N21/64

Abstract:
An apparatus includes: a diagnostic system configured to diagnostically interact with a current target (110c) traveling along a trajectory (TR) and before the current target enters a target space; a first detection apparatus (120) configured to detect first light; a second detection apparatus (130) configured to detect second light; and a control system (150) in communication with the first and second detection apparatuses. The first light includes: light (140) produced from an interaction between the current target and the diagnostic system, and light (142) emitted from a plasma produced by a previous target. The second light includes the light (142) emitted from the plasma produced by the previous target. The control system (150) is configured to: produce an analysis signal based on first and second signals produced from respective outputs of the first and second detection apparatuses; and estimate a property of the current target based on the produced analysis signal.
Public/Granted literature
- US20220086998A1 DETERMINING MOVING PROPERTIES OF A TARGET IN AN EXTREME ULTRAVIOLET LIGHT SOURCE Public/Granted day:2022-03-17
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