- 专利标题: Calibration of an electronics processing system
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申请号: US16860992申请日: 2020-04-28
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公开(公告)号: US11759954B2公开(公告)日: 2023-09-19
- 发明人: Nicholas Michael Bergantz , Damon K. Cox , Alexander Berger
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Lowenstein Sandler LLP
- 主分类号: B25J9/16
- IPC分类号: B25J9/16 ; H01L21/677 ; H01L21/67 ; H01L21/687 ; B65G47/90 ; H01L21/68 ; B25J11/00 ; B25J13/08
摘要:
A calibration object is placed at a target orientation in a station of an electronics processing device by a first robot arm, and then retrieved from the station by the first robot arm. The calibration object is transferred to an aligner station using the first robot arm, a second robot arm and/or a load lock, wherein the calibration object has a first orientation at the aligner station. The first orientation at the aligner station is determined. A characteristic error value is determined based on the first orientation. The aligner station is to use the characteristic error value for alignment of objects to be placed in the first station.
公开/授权文献
- US20210291374A1 CALIBRATION OF AN ELECTRONICS PROCESSING SYSTEM 公开/授权日:2021-09-23
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