Invention Grant
- Patent Title: Calibration of an electronics processing system
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Application No.: US16860992Application Date: 2020-04-28
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Publication No.: US11759954B2Publication Date: 2023-09-19
- Inventor: Nicholas Michael Bergantz , Damon K. Cox , Alexander Berger
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: B25J9/16
- IPC: B25J9/16 ; H01L21/677 ; H01L21/67 ; H01L21/687 ; B65G47/90 ; H01L21/68 ; B25J11/00 ; B25J13/08

Abstract:
A calibration object is placed at a target orientation in a station of an electronics processing device by a first robot arm, and then retrieved from the station by the first robot arm. The calibration object is transferred to an aligner station using the first robot arm, a second robot arm and/or a load lock, wherein the calibration object has a first orientation at the aligner station. The first orientation at the aligner station is determined. A characteristic error value is determined based on the first orientation. The aligner station is to use the characteristic error value for alignment of objects to be placed in the first station.
Public/Granted literature
- US20210291374A1 CALIBRATION OF AN ELECTRONICS PROCESSING SYSTEM Public/Granted day:2021-09-23
Information query
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