Invention Grant
- Patent Title: Plasma processing method and plasma processing apparatus
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Application No.: US16878098Application Date: 2020-05-19
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Publication No.: US11764034B2Publication Date: 2023-09-19
- Inventor: Chishio Koshimizu , Shin Hirotsu , Takenobu Ikeda , Koichi Nagami , Shinji Himori
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP 19099249 2019.05.28
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/00 ; H01H1/46

Abstract:
A plasma processing method according to an exemplary embodiment includes applying a first direct-current voltage to a lower electrode of a substrate support provided in a chamber of a plasma processing apparatus, in a first period during generation of plasma in the chamber. The plasma processing method further includes applying a second direct-current voltage to the lower electrode in a second period different from the first period during generation of plasma in the chamber. The second direct-current voltage has a level different from a level of the first direct-current voltage. The second direct-current voltage has a same polarity as a polarity of the first direct-current voltage.
Public/Granted literature
- US20200381215A1 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS Public/Granted day:2020-12-03
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