- 专利标题: Semiconductor storage device
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申请号: US17191217申请日: 2021-03-03
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公开(公告)号: US11765899B2公开(公告)日: 2023-09-19
- 发明人: Ryota Narasaki , Weili Cai , Satoshi Nagashima , Takayuki Ishikawa , Yusuke Shimada , Yefei Han
- 申请人: Kioxia Corporation
- 申请人地址: JP Tokyo
- 专利权人: KIOXIA CORPORATION
- 当前专利权人: KIOXIA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Foley & Lardner LLP
- 优先权: JP 20154168 2020.09.14
- 主分类号: H10B43/27
- IPC分类号: H10B43/27 ; H01L23/522 ; H10B41/27
摘要:
A semiconductor storage device includes a first conductive layer; a first insulating layer between the first and second conductive layers; a second insulating layer between the first conductive layer and the first insulating layer; a third insulating layer between the second conductive layer and the first insulating layer; a fourth insulating layer between the second conductive layer and the third conductive layer; a fifth insulating layer between the second conductive layer and the fourth insulating layer; and a sixth insulating layer between the third conductive layer and the fourth insulating layer. The first conductive layer has a first surface. The second conductive layer has a second surface. A barrier conductive film containing at least one of nitrogen (N) or titanium (Ti) is provided on the first surface and the second surface.
公开/授权文献
- US20220085060A1 SEMICONDUCTOR STORAGE DEVICE 公开/授权日:2022-03-17
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