- 专利标题: Micromechanical sensor
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申请号: US17447764申请日: 2021-09-15
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公开(公告)号: US11768221B2公开(公告)日: 2023-09-26
- 发明人: Andrea Visconti , Artjom Kosov , Jochen Hahn , Johannes Classen , Timo Giesselmann
- 申请人: Robert Bosch GmbH
- 申请人地址: DE Stuttgart
- 专利权人: ROBERT BOSCH GMBH
- 当前专利权人: ROBERT BOSCH GMBH
- 当前专利权人地址: DE Stuttgart
- 代理机构: NORTON ROSE FULBRIGHT US LLP
- 代理商 Gerard Messina
- 优先权: DE 2020211741.1 2020.09.21
- 主分类号: B81B7/02
- IPC分类号: B81B7/02 ; G01P15/18
摘要:
A micromechanical sensor, including a micromechanical chip having a first micromechanical structure, a first evaluation chip, having a first application-specific integrated circuit, and a second evaluation chip having a second application-specific integrated circuit. The first evaluation chip and the micromechanical chip are situated in a stacked manner, the micromechanical chip being directly electrically conductively connected with the first evaluation chip and the first evaluation chip being directly electrically conductively connected with the second evaluation chip. The first application-specific integrated circuit primarily includes analog circuit elements and the second application-specific circuit primarily includes digital circuit elements.
公开/授权文献
- US20220091157A1 MICROMECHANICAL SENSOR 公开/授权日:2022-03-24
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